Fan filter unit (FFU) is air cleaning equipment to supply purified air to the clean room for manufacturing semiconductor, liquid crystal, etc. The installation space is the system ceiling grid. For a large clean room, the number of required FFU is from several hundreds to several thousands.
Concept of FFU development1. To reduce running cost by saving energy;
2. To reduce construction cost and term by thin, light and compact structure;
3. To reduce initial cost by total design of clean room including noise spec. etc;
4. We development FFU units basing upon the above concept to meet all the requirements for constructing, operating and maintaining clean rooms.
